CEA-Leti to Report Latest Results on 3-Layer Integration,High Density TSVs & Other Packaging Topics at ECTC 2024, May 28-31
GRENOBLE, France – April 23, 2024 – CEA-Leti will present seven papers and one poster on its latest developments in microelectronics packaging, including three covering 3-layer integration, at the
Electronic Components and Technology Conference (ECTC), May 28-31, in Denver.
A pioneer in FD-SOI technology, the institute is at the forefront of heterogeneous 3D integration and enables the combination of More Moore and More than Moore technologies. 3D integration and advanced packaging technologies are becoming mainstream for modular, high-bandwidth, low power consumption and efficient system architectures from consumer and automotive applications to high performance computing (HPC) and edge AI multi-layer smart imagers developed in the frame of IRT Nanoelec.
From high-density interconnection (fine pitch hybrid bonding DtoW and WtoW) to ultra-thin stacking layer interconnection with high density TSV and low temperature process, CEA-Leti is pushing the limits of 3D integration. It also is preparing the next generation of quantum computing with a complete set of packaging technologies.
ECTC Papers / Poster
- “Aging Behaviour and Environmental Impact of Under Bump Metallurgies for Wafer Level Balling"
Session 37, poster #33
Wednesday, May 29 from 10:00 AM - 12:00 PM
- “3-Layer Fine Pitch Cu-Cu Hybrid Bonding Demonstrator With High Density TSV for Advanced CMOS Image Sensor Applications"
Session 8, paper #2
Wednesday, May 29 from 2:00 PM – 5:05 PM
- “Fine Pitch Nb-Nb Direct Bonding for Quantum Applications"
Session 11, paper #3
Wednesday, May 29 from 2:00 PM – 5:05 PM
- “Backside Thinning Process Development for High-Density TSV in a 3-Layers Integration"
Session 9, paper #6
Wednesday, May 29 from 2:00 PM – 5:05 PM
- “Process Development and Characterization of Ru-Based UBM for In Bumps Interconnects Integration for Quantum Assemblies"
Session 9, paper #7
Wednesday, May 29 from 2:00 PM – 5:05 PM
- “Copper Microstructure Optimization for Fine Pitch Low Temperature Cu/SiO2 Hybrid Bonding"
Session 15, paper #6:
Thursday, May 30 from 9:30 AM – 12:35 PM
- “Low Resistance and High Isolation HD TSV for 3-Layers CMOS Image Sensors"
Session 19, paper #2
Thursday, May 30 from 2:00 PM – 5:05 PM
- “Integration of Planarized Nb-Based Vias to Form a Multi-Level Superconducting Back-End-of-Line"
Session 20, paper #1
Thursday, May 30 from 2:00 PM – 5:05 PM
Jean-Charles Souriau, a CEA project leader in the field of micro-interconnection and packaging, will co-chair a May 29 technical program, Sub-Micron Scaling in Wafer-to-Wafer Hybrid Bonding. The Session 8 program will run from 2:00 PM – 5:05 PM.
CEA-Leti experts will be onsite at booth 511 and available to discuss the findings in the presentations.
ABOUT ECTC 2024
The Electronic Components and Technology Conference (ECTC) is the premier international event that brings together the best in packaging, components and microelectronic systems science, technology and education in an environment of cooperation and technical exchange. ECTC is sponsored by the IEEE Electronics Packaging Society.
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