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World’s Smallest-Footprint, MEMS-Based Gyroscope Developed with Politecnico di Milano Combines Best-in-Class Bias Stability and ARW Performance, While Keeping a High Resonant Frequency.
GRENOBLE, France – Nov. 18, 2021 – CEA-Leti scientists, in collaboration with researchers at Politecnico di Milano (POLIMI), have developed the world’s smallest-footprint MEMS gyroscope that is capable of providing navigation-grade performance. The researchers were able to meet these specifications with a sensor footprint of only 1.3 mm2 by leveraging nano-resistive sensing.
This improved performance must not come with a high cost so the device will be priced competitively in large-volume markets, such as the automotive and consumer markets,” said Philippe Robert, MEMS business development manager and senior expert at CEA-Leti. “The size of these new gyroscopes must therefore not exceed 2 mm² per axis, while maintaining standard MEMS technology and using wafer-level vacuum packaging.
CEA-Leti's Navigation Grade Performance vs. Best Current Commercial Gyroscopes
Top-view image of the gyroscope with false colors highlighting the drive and Coriolis frames and the corresponding decoupling levers
This architecture enables best-in-class MEMS gyroscopes in terms of overall performance, size and resonant frequency, and our breakthrough 1.3 mm² high-frequency device is already at the state-of-the-art performance in terms of noise, bias stability, scale range and bandwidth,” Robert said. “Several design and technology improvements are right now under investigation.
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.